Applications  Linear actuator - High-frequency operation

Applications

SC substrate cleaning equipment


Used for SC substrate auto cleaning.
Baskets containing SC substrates are moved up and down in the cleansing liquid to remove the impurities attached on the surface.
For reliable cleaning result, Lini-speed Jack needs to be extended and contracted continuously.
At this moment, the Lini-speed Jack achieves the maximum of 100% ED for allowable load hourly rate.
Lini-speed Jack is capable of high-frequency operation.


Advantage

  • ・High-frequency operation for continuous extend and retract motion.
  • ・High-speed operation for reliable cleaning result.