In semiconductor / liquid crystal manufacturing & inspection equipment used in clean rooms, it is used for moving parts above the work-piece part, which is extremely reluctant to generate dust.
It is also used for moving parts below the work-piece part in equipment with dust rising problems.

Advantage

• ・A cable system that achieves cleanliness class 1 low dust generation by adopting dedicated cables and tubes according to usage conditions.
• ・Achieves high durability with more than 10 million bends.
• ・Achieves noise of 38 dB (A) or less and contributes to a clean environment.
• ・Our unique support members maintain a defined path, and support/guide cables with stable operation.