Low dust generation and space-saving automation at the same time with lifting equipment in a clean environment
In order to automate the opening and closing of the doors of semiconductor lithography equipment, a space-saving electric actuator that can be introduced without changing the equipment layout was required.
Low dust emission was also important because the equipment was to be used in a clean room.
Therefore, the Zip Chain Actuator with a low floor and compact design was adopted. The use of clean grease suppresses the risk of dust generation while ensuring smooth integration into existing facilities.
| Problem | Industry | Application | Product group |
|---|---|---|---|
| Space saving | Liquid crystal, Semiconductor, Electronics, Telecommunications | Move linearly | Linear actuator |
Problem
The selection of a compact electric actuator with a low-floor, space-saving design that could be incorporated directly into the equipment without major changes to the existing equipment layout was required.
Furthermore, in the clean environment where semiconductor lithography equipment is installed, it was necessary to minimize the risk of dust generation, as contamination by foreign matter can lead to product defects and lower yields.
Adopted products
Zip Chain Actuator
Zip Chain is a chain uniquely developed by Tsubaki. Two chains interlock like a zipper to form a single, strong column for pushing and pulling applications.
Zip Chain Actuator is an entirely new linear actuator that employs this mechanism.
Zip chain can be stored in a compact case, saving a large amount of space compared to conventional linear actuators.
It is capable of high-speed and high-frequency operation and uses much less power than hydraulic and pneumatic cylinders.
High-precision multi-point stopping is possible, and the mounting direction is also free.
Effects of Product Adoption
Zip chain actuator enables automation without changing the equipment layout. Speedy automation was achieved with minimal design effort.
High-speed operation at 1000 mm/s also contributed to improved productivity and on-site work efficiency.
In addition, the use of clean grease significantly reduces the risk of dust generation.
This enables stable operation even in a clean environment, helping to maintain product quality.
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adopted products
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