Cable Protection in Clean Rooms Reduces dust generation and improves yield
For semiconductor, FPD manufacturing and inspection equipment used in clean rooms, it is important to suppress dust emissions that may lead to workpiece defects.
Cleanveyor contributes to yield improvement by cleanly supporting and guiding moving cables on the upper side of the workpiece due to its low dust emission in ISO Class 1 cleanliness.
| Problem | Industry | Application | Product group |
|---|---|---|---|
| Wear debris | Liquid crystal, Semiconductor, Electronics, Telecommunications | Supports, guides | Cable Carriers (CABLEVEYOR) |
Problem
When the moving parts of cable protectors are located above the workpiece in semiconductor and FPD manufacturing & inspection equipment, dust emissions have caused workpiece defects.
Adopted products
Cable carrier CLEANVEYOR
This is the lowest dust generating cable system among Tsubaki Cable Carrier (CABLEVEYOR).
Achieves ISO Class 1 cleanliness and is ideal for use in clean rooms.
Low noise of less than 36dB(A) and long life of more than 10 million bending cycles. (Based on our test results)
RoHS directive compliant. (Excluding cables and tubes supplied by the customer)
Effects of Product Adoption
The cleanveyor integrated with a fluoroplastic material pod enabled lower dust emissions, leading to improved yields.
In addition, the ISO Class 1 cleanliness has contributed to improving the reliability of the equipment in clean rooms.
Tsubaki will do its utmost to support you in solving any problems you may have.
Please feel free to contact us with any concerns you may have.
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adopted products
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